For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11075194 B1

Expired

Date of Patent:

Jul. 27, 2021

Filed:

Jun. 30, 2019

Ic with test structures and e-beam pads embedded within a contiguous standard cell area

Applicant:

Pdf Solutions, Inc., Santa Clara, CA (US);

Inventors:

Stephen Lam, Freemont, CA (US);

Dennis Ciplickas, San Jose, CA (US);

Tomasz Brozek, Morgan Hill, CA (US);

Jeremy Cheng, San Jose, CA (US);

Simone Comensoli, Darfo Boario Terme, IT;

Indranil De, Mountain View, CA (US);

Kelvin Doong, Hsinchu, TW;

Hans Eisenmann, Tutzing, DE;

Timothy Fiscus, New Galilee, PA (US);

Jonathan Haigh, Pittsburgh, PA (US);

Christopher Hess, Belmont, CA (US);

John Kibarian, Los Altos Hills, CA (US);

Sherry Lee, Monte Sereno, CA (US);

Marci Liao, Santa Clara, CA (US);

Sheng-Che Lin, Hsinchu, TW;

Hideki Matsuhashi, Santa Clara, CA (US);

Kimon Michaels, Monte Sereno, CA (US);

Conor O'Sullivan, Campbell, CA (US);

Markus Rauscher, Munich, DE;

Vyacheslav Rovner, Pittsburgh, PA (US);

Andrzej Strojwas, Pittsburgh, PA (US);

Marcin Strojwas, Pittsburgh, PA (US);

Carl Taylor, Pittsburgh, PA (US);

Rakesh Vallishayee, Dublin, CA (US);

Larg Weiland, Hollister, CA (US);

Nobuharu Yokoyama, Tokyo, JP;

Matthew Moe, Pittsburgh, PA (US);

Assignee:

PDF Solutions, Inc., Santa Clara, CA (US);

Attorney:

David Garrod, Esq.

Primary Examiner:

Bradley Smith

Assistant Examiner:

David J Goodwin

Int. Cl.

CPC ...

H01L 21/66 (2006.01); H01L 27/02 (2006.01); H01L 23/528 (2006.01); H01L 27/088 (2006.01); H01L 23/522 (2006.01); H01L 21/3213 (2006.01); H01L 29/08 (2006.01); H01L 29/45 (2006.01); H01L 21/8234 (2006.01); H01J 37/26 (2006.01); H03K 19/0944 (2006.01); G01R 31/28 (2006.01); G06F 30/39 (2020.01);

U.S. Cl.

CPC ...

H01L 27/0207 (2013.01); G01R 31/2884 (2013.01); G06F 30/39 (2020.01); H01J 37/261 (2013.01); H01L 21/32139 (2013.01); H01L 21/823475 (2013.01); H01L 22/32 (2013.01); H01L 22/34 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 23/5286 (2013.01); H01L 27/088 (2013.01); H01L 29/0847 (2013.01); H01L 29/45 (2013.01); H03K 19/0944 (2013.01); H01J 2237/2817 (2013.01);

Abstract

An IC that includes a contiguous standard cell area with a 4×3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.

Find Patent Forward Citations

Lam, Stephen. (2021). Ic with test structures and e-beam pads embedded within a contiguous standard cell area (U.S. Patent No. 11075194). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11075194

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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