For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10269786 B1

Date of Patent:

Apr. 23, 2019

Filed:

Mar. 30, 2017

Integrated circuit containing first and second does of standard cell compatible, ncem-enabled fill cells, with the first doe including tip-to-side short configured fill cells, and the second doe including corner short configured fill cells

Applicant:

Pdf Solutions, Inc., San Jose, CA (US);

Inventors:

Stephen Lam, Freemont, CA (US);

Dennis Ciplickas, San Jose, CA (US);

Tomasz Brozek, Morgan Hill, CA (US);

Jeremy Cheng, San Jose, CA (US);

Simone Comensoli, Darfo Boario Terme, IT;

Indranil De, Mountain View, CA (US);

Kelvin Doong, Hsinchu, TW;

Hans Eisenmann, Tutzing, DE;

Timothy Fiscus, New Galilee, PA (US);

Jonathan Haigh, Pittsburgh, PA (US);

Christopher Hess, Belmont, CA (US);

John Kibarian, Los Altos Hills, CA (US);

Sherry Lee, Monte Sereno, CA (US);

Marci Liao, Santa Clara, CA (US);

Sheng-Che Lin, Hsinchu, TW;

Hideki Matsuhashi, Santa Clara, CA (US);

Kimon Michaels, Monte Sereno, CA (US);

Conor O'Sullivan, Campbell, CA (US);

Markus Rauscher, Munich, DE;

Vyacheslav Rovner, Pittsburgh, PA (US);

Andrzej Strojwas, Pittsburgh, PA (US);

Marcin Strojwas, Pittsburgh, PA (US);

Carl Taylor, Pittsburgh, PA (US);

Rakesh Vallishayee, Dublin, CA (US);

Larg Weiland, Hollister, CA (US);

Nobuharu Yokoyama, Tokyo, JP;

Assignee:

PDF Solutions, Inc., Santa Clara, CA (US);

Attorney:

David Garrod

Primary Examiner:

Duy T Nguyen

Int. Cl.

CPC ...

H01L 23/58 (2006.01); H01L 29/10 (2006.01); H01L 27/118 (2006.01); H01L 27/02 (2006.01); H01L 29/45 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 21/66 (2006.01); H01L 21/8234 (2006.01); H01L 27/088 (2006.01);

U.S. Cl.

CPC ...

H01L 27/0207 (2013.01); H01L 21/823437 (2013.01); H01L 21/823475 (2013.01); H01L 22/20 (2013.01); H01L 22/32 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 27/088 (2013.01); H01L 29/45 (2013.01);

Abstract

An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements ('NCEM'). The first DOE contains fill cells configured to enable non-contact (NC) detection of tip-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of corner shorts.

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