Pleasanton, CA, United States of America

Shifang Li

This inventor holds 72 USPTO granted patents and 3 published patent applications and 6 EPO patents, primarily in Optical Metrology (CPC class G01N). Top assignees: Tokyo Electron Limited, Kla Tencor Corporation, Timbre Technologies, Inc.. Active years: 2000-2026.

USPTO Granted Patents = 72 (Patent Applications = 3)

% Patents Active = 51.4

EPO Patents = 6 (Patent Applications = 7)

Average Co-Inventor Count = 2.2

ph-index = 10

Forward Citations = 370(Granted Patents)

Forward Citations (Not Self Cited) = 283(Dec 10, 2025)

Inventors with similar research interests:

Company Filing History:

31 out of 10,862

Tokyo Electron Limited

patents

13 out of 1,787

Kla Tencor Corporation

patents

12 out of 72

Timbre Technologies, Inc.

patents

4. 5 out of 115

Oplink Communications, Inc.

patents

5. 4 out of 14,418

Applied Materials, Inc.

Oplinic Communications, Inc.

patent

9. 1 out of 1

Transamerica Technologies International

patent

10. 1 out of 1

Transamerican Technologies International Dba Tti Medical

patent

Years Active: 2000-2026

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Areas of Expertise:

Optical Metrology

Semiconductor Inspection

Temperature Calibration

Height Sensor

Wafer Inspection

Spectroscopic Measurements

Inline Screening

Metrology Models

Profile Parameters

Process Control

Diffraction Signals

Film Stack Measurement

72 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12660556 - Using un-patterned and patterned metrology targets for in situ process monitoring (2026-06-16),

2. 12489005 - Temperature-based metrology calibration at a manufacturing system (2025-12-02),

3. 12422376 - Imaging reflectometry for inline screening (2025-09-23),

4. 12386342 - Holistic analysis of multidimensional sensor data for substrate processing equipment (2025-08-12),

5. 12249525 - Using spectroscopic measurements for substrate temperature monitoring (2025-03-11),

6. 11544838 - Systems and methods of high-resolution review for semiconductor inspection in backend and wafer level packaging (2023-01-03),

7. 11221300 - Determining metrology-like information for a specimen using an inspection tool (2022-01-11),

8. 10563973 - All surface film metrology system (2020-02-18),

9. 10540759 - Bonded wafer metrology (2020-01-21),

10. 10495446 - Methods and apparatus for measuring height on a semiconductor wafer (2019-12-03),

11. 10372113 - Method for defocus detection (2019-08-06),

12. 10088298 - Method of improving lateral resolution for height sensor using differential detection technology for semiconductor inspection and metrology (2018-10-02),

13. 9958257 - Increasing dynamic range of a height sensor for inspection and metrology (2018-05-01),

14. 9885656 - Line scan knife edge height sensor for semiconductor inspection and metrology (2018-02-06),

15. 9863756 - Line scan spectroscopic white light interferometry for semiconductor inspection and metrology (2018-01-09),

Title: The Innovative Journey of Inventor Shifang Li

Introduction: Shifang Li, a talented inventor based in Pleasanton, CA, has made significant contributions to the world of technology through his groundbreaking innovations.

Latest Patents: Shifang Li holds several patents in the field of artificial intelligence and renewable energy technologies, showcasing his commitment to creating sustainable solutions for the future.

Career Highlights: With a background in engineering and a passion for problem-solving, Shifang Li has led successful projects that have revolutionized the way we approach clean energy and data analysis.

Collaborations: Throughout his career, Shifang Li has collaborated with leading research institutions and tech companies to further develop his inventions and bring them to market, solidifying his reputation as a visionary in his field.

Conclusion: Inventor Shifang Li's dedication to innovation and his relentless pursuit of excellence continue to inspire the next generation of inventors and shape the landscape of technological advancements.