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Ulvac Coating Corporation

USPTO Granted Patents = 15

% Expired Patents = 13.3

Trademarks = 1

Forward Citations = 234

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19 inventors (with patents filed for the assignee):

Akihiko Isao (10 out of 14 patents)

Nobuyuki Yoshioka (10 out of 42 patents)

Junji Miyazaki (6 out of 18 patents)

4. Susumu Kawada (5 out of 9 patents)

5. Yaichiro Watakabe (5 out of 17 patents)

6. Ryoichi Kobayashi (5 out of 7 patents)

7. Takaei Sasaki (4 out of 6 patents)

8. Noriyuki Harashima (4 out of 6 patents)

9. Satoshi Aoyama (3 out of 10 patents)

10. Kazuyuki Maetoko (3 out of 5 patents)

11. Shouichi Sakamoto (3 out of 5 patents)

12. Shigenori Yamashita (2 out of 6 patents)

13. Kouichiro Narimatsu (2 out of 2 patents)

14. Atsushi Hayashi (2 out of 3 patents)

15. Kagehiro Kageyama (1 out of 1 patent)

15 patents: Sort by Forward Citations

1. 8216745 - Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask (2012-07-10),

2. 7282308 - Phase shifter film and process for the same (2007-10-16),

3. 7090947 - Phase shifter film and process for the same (2006-08-15),

4. 7063922 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2006-06-20),

5. 7001698 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2006-02-21),

6. 6881991 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2005-04-19),

7. 6844117 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2005-01-18),

8. 5952128 - Phase-shifting photomask blank and method of manufacturing the same as (1999-09-14),

9. 5830607 - Phase shift mask and manufacturing method thereof and exposure method (1998-11-03),

10. 5691090 - Phase shift mask and manufacturing method thereof and exposure method (1997-11-25),

11. 5674647 - Phase shift mask and manufacturing method thereof and exposure method (1997-10-07),

12. 5629114 - Phase shift mask and manufacturing method thereof and exposure method (1997-05-13),

13. 5605776 - Phase-shifting photomask blank, phase-shifting photomask, and method of (1997-02-25),

14. 5482799 - Phase shift mask and manufacturing method thereof (1996-01-09),

15. 5474864 - Phase shift mask and manufacturing method thereof and exposure method (1995-12-12),

Company Overview

Ulvac Coating Corporation, based in Saitama, Japan, specializes in advanced coating technologies and vacuum systems. The company focuses on developing innovative solutions for various industries, including electronics, automotive, and optics. With a commitment to enhancing performance and efficiency, Ulvac integrates cutting-edge research in thin film deposition and surface treatment. Their expertise supports the production of high-quality components essential for modern technological applications, contributing to advancements in manufacturing processes globally.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 6 2026

15 Patents

#65 in Saitama 343-0827

#3,442 in Japan

#39,881 in the World

Ulvac Coating Corporation

Forward Citations = 234

19 inventors:

Akihiko Isao (10 out of 14 patents)

Nobuyuki Yoshioka (10 out of 42 patents)

Junji Miyazaki (6 out of 18 patents)

4. Susumu Kawada (5 out of 9 patents)

5. Yaichiro Watakabe (5 out of 17 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Ulvac Coating Corporation. Retrieved from https://idiyas.com/company/ulvac-coating

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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