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Ulvac Coating Corporation

USPTO Granted Patents = 15

Trademarks = 1

Forward Citations = 234

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19 inventors (with patents filed for the assignee):

Akihiko Isao (10 out of 14 patents)

Nobuyuki Yoshioka (10 out of 42 patents)

Junji Miyazaki (6 out of 18 patents)

4. Susumu Kawada (5 out of 9 patents)

5. Yaichiro Watakabe (5 out of 17 patents)

6. Ryoichi Kobayashi (5 out of 7 patents)

7. Takaei Sasaki (4 out of 6 patents)

8. Noriyuki Harashima (4 out of 6 patents)

9. Satoshi Aoyama (3 out of 10 patents)

10. Kazuyuki Maetoko (3 out of 5 patents)

11. Shouichi Sakamoto (3 out of 5 patents)

12. Shigenori Yamashita (2 out of 6 patents)

13. Kouichiro Narimatsu (2 out of 2 patents)

14. Atsushi Hayashi (2 out of 3 patents)

15. Kagehiro Kageyama (1 out of 1 patent)

15 patents: Sort by Forward Citations

1. 8216745 - Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask (2012-07-10),

2. 7282308 - Phase shifter film and process for the same (2007-10-16),

3. 7090947 - Phase shifter film and process for the same (2006-08-15),

4. 7063922 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2006-06-20),

5. 7001698 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2006-02-21),

6. 6881991 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2005-04-19),

7. 6844117 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2005-01-18),

8. 5952128 - Phase-shifting photomask blank and method of manufacturing the same as (1999-09-14),

9. 5830607 - Phase shift mask and manufacturing method thereof and exposure method (1998-11-03),

10. 5691090 - Phase shift mask and manufacturing method thereof and exposure method (1997-11-25),

11. 5674647 - Phase shift mask and manufacturing method thereof and exposure method (1997-10-07),

12. 5629114 - Phase shift mask and manufacturing method thereof and exposure method (1997-05-13),

13. 5605776 - Phase-shifting photomask blank, phase-shifting photomask, and method of (1997-02-25),

14. 5482799 - Phase shift mask and manufacturing method thereof (1996-01-09),

15. 5474864 - Phase shift mask and manufacturing method thereof and exposure method (1995-12-12),

Ulvac Coating Corporation is a global leader in the design and manufacture of vacuum coating equipment. With a focus on research and development, Ulvac provides innovative solutions for a wide range of industries including electronics, optics, and automotive. The company's state-of-the-art technology and commitment to quality have earned them a reputation for excellence in the industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

15 Patents

#57 in Saitama 343-0827

#3,363 in Japan

#38,669 in the World

Ulvac Coating Corporation

Forward Citations = 234

19 inventors:

Akihiko Isao (10 out of 14 patents)

Nobuyuki Yoshioka (10 out of 42 patents)

Junji Miyazaki (6 out of 18 patents)

4. Susumu Kawada (5 out of 9 patents)

5. Yaichiro Watakabe (5 out of 17 patents)

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