Kagehiro Kageyama

Title: Kagehiro Kageyama: Innovator in Halftone Mask Technology

Introduction

Kagehiro Kageyama is a notable inventor based in Chichibu, Japan. He has made significant contributions to the field of etching technology, particularly through his innovative work on halftone masks. His expertise and creativity have led to advancements that enhance the versatility of etching processes.

Latest Patents

Kageyama holds a patent for a "Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask." This invention focuses on a halftone mask that increases the versatility of an etching stopper layer. The design includes a transparent portion using a glass substrate, a first semi-transparent portion formed on the glass substrate, and a light shield portion that incorporates a light shield layer superimposed above the first semi-transparent layer. The materials used in the layers are carefully selected to optimize performance, including chromium and various compounds.

Career Highlights

Kageyama is currently employed at Ulvac Coating Corporation, where he continues to develop innovative solutions in the field of coating and etching technologies. His work has been instrumental in advancing the capabilities of halftone masks, which are crucial in various manufacturing processes.

Collaborations

Kageyama collaborates with Fumihiko Yamada, a fellow innovator in the field. Their partnership has fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Kagehiro Kageyama's contributions to halftone mask technology exemplify the impact of innovation in manufacturing processes. His patent and ongoing work at Ulvac Coating Corporation highlight his role as a key figure in advancing etching technologies.