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Saitama-ken, Japan

Takaei Sasaki

USPTO Granted Patents = 6 (Patent Applications = 1)

Average Co-Inventor Count = 3.4

ph-index = 2

Forward Citations = 24(Granted Patents)

Company Filing History:

Ulvac Coating Corporation

3 out of 21,351

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Denki Kabushiki

4. 2 out of 832,880

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patents

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Years Active: 2002-2006

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7063922 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2006-06-20),

2. 7001698 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2006-02-21),

3. 6881991 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2005-04-19),

4. 6844117 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof (2005-01-18),

5. 6685848 - METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HALF-TONE PHASE-SHIFT PHOTOMASKS AND METHOD FOR THE PREPARATION THEREOF AND SEMICONDUCTOR CIRCUITS AND METHOD FOR THE FABRICATION THEREOF (2004-02-03),

6. 6391791 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof (2002-05-21),

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