Location History:
- Itami, JP (1997)
- Hyogo-ken, JP (2003)
- Tokyo, JP (2006)
- Hyogo, JP (2006 - 2007)
Company Filing History:
3 out of 15 
2 out of 21,351 
2 out of 3,781 
Years Active: 1997-2007
Title: Kazuyuki Maetoko: Innovator in Phase Shifter Technology
Introduction
Kazuyuki Maetoko is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of phase shifter technology, holding a total of 5 patents. His work has been instrumental in advancing the capabilities of halftone type phase shift masks, which are essential in photolithography processes.
Latest Patents
One of Maetoko's latest patents involves a phase shifter film and the process for its creation. In this innovation, a halftone type phase shift mask is formed by providing a reactive gas introduction inlet and an inert gas introduction inlet. This allows for the separate introduction of gases. By utilizing a reactive low throw sputtering method, a molybdenum silicide-based phase shifter film is created. This advancement enables the production of halftone type phase shift masks that are applicable to both ArF and KrF lasers, utilizing molybdenum silicide-based materials.
Career Highlights
Throughout his career, Kazuyuki Maetoko has worked with notable companies such as Ulvac Coating Corporation and Mitsubishi Electric Corporation. His experience in these organizations has contributed to his expertise in the field of phase shifter technology.
Collaborations
Maetoko has collaborated with several talented individuals, including Akihiko Isao and Susumu Kawada. These partnerships have fostered innovation and development in his projects.
Conclusion
Kazuyuki Maetoko's contributions to phase shifter technology and his innovative patents have made a significant impact in the field. His work continues to influence advancements in photolithography, showcasing the importance of innovation in technology.