Location History:
- Itami, JP (1979 - 1991)
- Hyogo, JP (1990 - 1998)
Company Filing History:
17 out of 21,351 
5 out of 15 Years Active: 1979-1998
Title: The Innovations of Yaichiro Watakabe
Introduction
Yaichiro Watakabe is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of technology, particularly in the development of phase shift masks. With a total of 17 patents to his name, Watakabe's work has had a lasting impact on the industry.
Latest Patents
One of his latest patents involves a phase shift mask and its manufacturing method. This innovation includes a second light transmit portion formed from materials such as molybdenum silicide nitride oxide or chromium oxide. The design allows for a phase shift of transmitted exposure light by 180 degrees, with a transmittance ranging from 2% to less than 5%. The manufacturing method utilizes a sputtering technique, which simplifies the process by requiring only a single etching step for the phase shifter portion. This advancement reduces the likelihood of defects and errors during production.
Career Highlights
Throughout his career, Watakabe has worked with notable companies, including Mitsubishi Electric Corporation and Ulvac Coating Corporation. His experience in these organizations has contributed to his expertise in the field of semiconductor manufacturing and technology.
Collaborations
Watakabe has collaborated with several professionals in his field, including Shuichi Matsuda and Akihiko Isao. These partnerships have fostered innovation and development in various projects.
Conclusion
Yaichiro Watakabe's contributions to technology, particularly in the area of phase shift masks, demonstrate his innovative spirit and dedication to advancing the industry. His patents and collaborations reflect a commitment to excellence and progress in the field.