Hyogo, Japan

Shigenori Yamashita


Average Co-Inventor Count = 7.6

ph-index = 4

Forward Citations = 96(Granted Patents)


Location History:

  • Hyogo, JP (1997 - 2001)
  • Tokyo, JP (2003)

Company Filing History:


Years Active: 1997-2003

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6 patents (USPTO):Explore Patents

Title: The Innovative Mind of Shigenori Yamashita

Introduction

Shigenori Yamashita, an accomplished inventor based in Hyogo, Japan, has made significant contributions to the fields of semiconductor technology and photolithography. With a total of six patents under his name, his innovations focus primarily on enhancing the precision and effectiveness of semiconductor devices.

Latest Patents

Yamashita's latest patents showcase his expertise in the realm of photomasks and semiconductor devices. One notable invention is a semiconductor device and method for exposing through a photomask. This invention details a photomask that comprises a substrate along with an on-mask circuit area and a test mark area, both essential for ensuring accurate measurements during the photolithography process. His innovative designs allow for precise calibration of overlay displacements, which are vital for achieving high registration accuracy in semiconductor fabrication.

Another of his recent contributions is a method of creating a registration accuracy measurement mark, which is critical for maintaining accuracy between semiconductor element forming members. His inventions reduce the impact of optical aberrations on measurement, ensuring that the patterns formed correspond closely to the intended designs.

Career Highlights

Throughout his career, Shigenori Yamashita has been affiliated with well-known companies including Mitsubishi Electric Corporation and Ulvac Coating Corporation. His work in these organizations has significantly advanced semiconductor manufacturing techniques, and his patents reflect the cumulative knowledge gained through these experiences.

Collaborations

In his journey of innovation, Yamashita has had the opportunity to collaborate with esteemed colleagues such as Nobuyuki Yoshioka and Yuki Miyamoto. Together, they have contributed to developments that are integral to the semiconductor industry, further showcasing the impact of teamwork in advancing technological frontiers.

Conclusion

Shigenori Yamashita stands out as a pivotal figure in semiconductor innovation, with a solid portfolio of patents that reflect his dedication to improving photolithography processes. His work not only benefits the companies he has been part of but also sets a foundation for future advancements in semiconductor technology. As industries continue to evolve, inventors like Yamashita will remain at the forefront, driving innovations that facilitate growth and efficiency.

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