Hyogo-ken, Japan

Shouichi Sakamoto


Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 23(Granted Patents)


Company Filing History:


Years Active: 2002-2006

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5 patents (USPTO):Explore Patents

Title: Shouichi Sakamoto: Innovator in Semiconductor Technology

Introduction

Shouichi Sakamoto is a prominent inventor based in Hyogo-ken, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work primarily focuses on methods and apparatuses for dry-etching half-tone phase-shift films and photomasks.

Latest Patents

Sakamoto's latest patents include a method and apparatus for dry-etching half-tone phase-shift films, as well as half-tone phase-shift photomasks. His innovative dry-etching method involves using a mixed gas that includes a reactive ion etching gas and a reducing gas. This method allows for the production of high-precision patterns on photomasks, which are essential for manufacturing semiconductor circuits. The process effectively reduces dimensional differences caused by the coexistence of coarse and dense patterns, ensuring the creation of high-quality pattern-etched products.

Career Highlights

Throughout his career, Sakamoto has worked with notable companies, including Ulvac Coating Corporation. His expertise in semiconductor technology has positioned him as a key figure in the industry, contributing to advancements that enhance manufacturing processes.

Collaborations

Sakamoto has collaborated with esteemed colleagues such as Takaei Sasaki and Noriyuki Harashima. These partnerships have further enriched his work and have led to significant developments in the field.

Conclusion

Shouichi Sakamoto's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance as an inventor. His work continues to influence the industry, paving the way for future advancements in semiconductor manufacturing.

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