Location History:
- Chichibu, JP (1997 - 1999)
- Saitama-ken, JP (2001 - 2004)
- Saitama, JP (1995 - 2007)
Company Filing History:
10 out of 15 
7 out of 21,351 
2 out of 3,781 
Years Active: 1995-2007
Title: Innovator Akihiko Isao: Advancing Phase Shifting Technology
Introduction
Akihiko Isao, a distinguished inventor based in Saitama, Japan, has made significant contributions to the field of phase shifting technology. With a remarkable portfolio comprising 14 patents, he has been a driving force in advancing innovative materials and processes that enhance the performance of various devices.
Latest Patents
Among his notable inventions is the "Phase Shifter Film and Process for the Same." This patent describes a method for fabricating halftone type phase shift masks. The process involves the introduction of reactive and inert gases separately through dedicated inlets. Utilizing a reactive low throw sputtering method, Isao has developed a molybdenum silicide based phase shifter film. This innovation enables the creation of halftone type phase shift masks suitable for ArF and KrF lasers, showcasing the applicability of molybdenum silicide based materials in advanced photolithography.
Career Highlights
Isao has held key positions in reputable companies, including Ulvac Coating Corporation and Mitsubishi Denki Kabushiki Kaisha. His expertise in material science and engineering has been instrumental in these organizations, where he has worked on groundbreaking projects that aim to improve semiconductor manufacturing processes through innovative phase shifting technologies.
Collaborations
Throughout his career, Akihiko Isao has collaborated with esteemed colleagues, including Nobuyuki Yoshioka and Susumu Kawada. These partnerships have fostered a collaborative environment that promotes the exchange of ideas and enhances the developmental landscape of phase shifting technology.
Conclusion
Akihiko Isao's contributions to the field of phase shifting technology exemplify the spirit of innovation that drives the industry forward. His patents not only reflect his dedication to advancing technology but also emphasize the importance of collaboration and working with leading professionals in the field. With a promising career and numerous patents to his name, Isao continues to shape the future of semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.