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Camarillo, CA, United States of America

Micro Materials Inc.

USPTO Granted Patents = 27

EPO Patents = 7

Trademarks = 2

Forward Citations = 92

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37 inventors (with patents filed for the assignee):

Regina Germanie Freed (16 out of 35 patents)

Uday Mitra (15 out of 22 patents)

Ho-yung David Hwang (10 out of 28 patents)

4. Ying Di Zhang (8 out of 193 patents)

5. Amrita B Mullick (6 out of 13 patents)

6. Nitin K Ingle (6 out of 224 patents)

7. He Ren (5 out of 63 patents)

8. Srinivas D Nemani (5 out of 236 patents)

9. Abhijit Basu Mallick (4 out of 217 patents)

10. Qiwei Liang (4 out of 69 patents)

11. Sean S Kang (4 out of 57 patents)

12. Adib M Khan (4 out of 27 patents)

13. Madhur Sachan (4 out of 14 patents)

14. Sanjay S Natarajan (4 out of 31 patents)

15. Yung-chen Lin (3 out of 16 patents)

27 patents: Sort by Forward Citations

1. 11705366 - Methods for controllable metal and barrier-liner recess (2023-07-18),

2. 11527421 - Gas delivery system for high pressure processing chamber (2022-12-13),

3. 11437274 - Fully self-aligned via (2022-09-06),

4. 11437273 - Self-aligned contact and contact over active gate structures (2022-09-06),

5. 11164938 - DRAM capacitor module (2021-11-02),

6. 11114333 - Method for depositing and reflow of a high quality etch resistant gapfill dielectric film (2021-09-07),

7. 11097306 - Support for bonding a workpiece and method thereof (2021-08-24),

8. 11062942 - Methods for controllable metal and barrier-liner recess (2021-07-13),

9. 11049695 - Metal contact landing structure (2021-06-29),

10. 11037825 - Selective removal process to create high aspect ratio fully self-aligned via (2021-06-15),

11. 10892187 - Method for creating a fully self-aligned via (2021-01-12),

12. 10892183 - Methods for removing metal oxides (2021-01-12),

13. 10790191 - Selective removal process to create high aspect ratio fully self-aligned via (2020-09-29),

14. 10720341 - Gas delivery system for high pressure processing chamber (2020-07-21),

15. 10699953 - Method for creating a fully self-aligned via (2020-06-30),

Micro Materials Inc. is a leading global supplier of innovative material testing equipment and services. With over 30 years of experience, we specialize in developing and manufacturing nanomechanical testing systems for materials research and characterization. Our cutting-edge solutions enable scientists and engineers to understand the mechanical and tribological properties of materials at the micro and nano scales. Visit our website to explore our wide range of products, applications, and support services.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

27 Patents

#11 in Camarillo, CA

#2,846 in California

#11,991 in US

#23,273 in the World

Camarillo, CA, United States of America

Micro Materials Inc.

Forward Citations = 92

37 inventors:

Regina Germanie Freed (16 out of 35 patents)

Uday Mitra (15 out of 22 patents)

Ho-yung David Hwang (10 out of 28 patents)

4. Ying Di Zhang (8 out of 193 patents)

5. Amrita B Mullick (6 out of 13 patents)

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