The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Sep. 14, 2020
Micromaterials Llc, Wilmington, DE (US);
Regina Freed, Los Altos, CA (US);
Madhur Sachan, Belmont, CA (US);
Susmit Singha Roy, Sunnyvale, CA (US);
Gabriela Alva, Campbell, CA (US);
Ho-yung David Hwang, Cupertino, CA (US);
Uday Mitra, Cupertino, CA (US);
El Mehdi Bazizi, San Jose, CA (US);
Angada Bangalore Sachid, San Jose, CA (US);
He Ren, San Jose, CA (US);
Sushant Mittal, Karnataka, IN;
Micromaterials LLC, Wilmington, DE (US);
Abstract
Apparatuses and methods to provide a fully self-aligned via are described. A first metallization layer comprises a set of first conductive lines extending along a first direction on a first insulating layer on a substrate, the set of first conductive lines recessed below a top portion of the first insulating layer. A capping layer is on the first insulating layer, and a second insulating layer is on the capping layer. A second metallization layer comprises a set of second conductive lines on the second insulating layer and on a third insulating layer above the first metallization layer. The set of second conductive lines extend along a second direction that crosses the first direction at an angle. At least one via is between the first metallization layer and the second metallization layer. The via is self-aligned along the second direction to one of the first conductive lines. The tapering angle of the via opening may be in a range of from about 60° to about 120°.