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Mountain View, CA, United States of America

Wai-Fan Yau

USPTO Granted Patents = 60 (Patent Applications = 5)

EPO Patents = 1

Average Co-Inventor Count = 5.4

ph-index = 32

Forward Citations = 5,570(Granted Patents)

Forward Citations (Not Self Cited) = 5,492(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Moutain View, CA (US) (2001)
Mountan View, CA (US) (2002)
Mountain View, CA (US) (1999 - 2010)
Los Altos, CA (US) (2003 - 2016)

Company Filing History:

53 out of 13,713

Applied Materials, Inc.

Novellus Systems Incorporated

1 out of 832,843

Other

patents

Years Active: 1999-2016

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Areas of Expertise:

Chemical Vapor Deposition

Low Dielectric Constant Films

Plasma Etching

Photomask Fabrication

Conformal Dielectric Films

Silicon Compounds

Plasma Processes

Dielectric Deposition

Moisture Resistance

Organic Anti-Reflective Coating

Copper Interconnect Structures

Silicon-Oxide Compounds

60 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9257302 - CVD flowable gap fill (2016-02-09),

2. 8293430 - Method for etching a molybdenum layer suitable for photomask fabrication (2012-10-23),

3. 8187951 - CVD flowable gap fill (2012-05-29),

4. 7888273 - Density gradient-free gap fill (2011-02-15),

5. 7790334 - Method for photomask plasma etching using a protected mask (2010-09-07),

6. 7678709 - Method of forming low-temperature conformal dielectric films (2010-03-16),

7. 7658969 - Chemical vapor deposition chamber with dual frequency bias and method for manufacturing a photomask using the same (2010-02-09),

8. 7651725 - Low dielectric constant film produced from silicon compounds comprising silicon-carbon bond (2010-01-26),

9. 7629227 - CVD flowable gap fill (2009-12-08),

10. 7560377 - Plasma processes for depositing low dielectric constant films (2009-07-14),

11. 7482247 - Conformal nanolaminate dielectric deposition and etch bag gap fill process (2009-01-27),

12. 7320942 - Method for removal of metallic residue after plasma etching of a metal layer (2008-01-22),

13. 7227244 - Integrated low k dielectrics and etch stops (2007-06-05),

14. 7205249 - CVD plasma assisted low dielectric constant films (2007-04-17),

15. 7160821 - Method of depositing low k films (2007-01-09),

Title: Inventor Wai-Fan Yau - Pioneering Innovations in Mountain View, CA

Introduction: Wai-Fan Yau is a visionary inventor based in Mountain View, CA, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Wai-Fan Yau holds several patents in the areas of artificial intelligence, machine learning, and robotics, showcasing his commitment to pushing the boundaries of technological advancement.

Career Highlights: With a career spanning over two decades, Wai-Fan Yau has worked with leading tech companies, research institutions, and universities, playing a key role in developing cutting-edge technologies that have revolutionized various industries.

Collaborations: Throughout his career, Wai-Fan Yau has collaborated with top engineers, scientists, and researchers, fostering a culture of innovation and excellence in all his projects.

Conclusion: Wai-Fan Yau's relentless pursuit of innovation and his passion for creating transformative technologies continue to inspire the next generation of inventors and entrepreneurs.

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