Aalen, Germany

Alexandra Pazidis

This inventor holds 21 USPTO granted patents and 7 published patent applications and 2 EPO patents, primarily in Optical Engineering. Top assignees: Carl Zeiss Smt Gmbh, Carl-Zeiss-Smt Ag, Carl Zeiss Laser Optics Gmbh. Active years: 2004-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Alexandra Pazidis. Retrieved from https://idiyas.com/inventor/alexandra-pazidis

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 21 

% Patents Active = 33.3

 

Average Co-Inventor Count = 3.5

ph-index = 3

Forward Citations = 113(Granted Patents)


Location History:

  • Aalen, DE (2004 - 2017)
  • Essingen-Lauterburg, DE (2017)
  • Essingen-Lautenburg, DE (2010 - 2024)

Company Filing History:


Years Active: 2004-2026

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Areas of Expertise:
Optical Element
Microlithography
Projection Exposure
Reflective Coating
Nanostructures
Mirror Assembly
Antireflection Coating
Illumination System
Intensity Compensation
Optical Arrangement
Immersion Lithography
Decontamination
21 patents (USPTO):Explore Patents

Title: Innovations and Contributions of Alexandra Pazidis in Nanotechnology

Introduction: Alexandra Pazidis, based in Aalen, Germany, is a prominent inventor with an impressive portfolio of 19 patents. Her work primarily focuses on advancements in nanotechnology and optical elements, contributing significantly to the field, especially in the FUV/VUV wavelength range.

Latest Patents: Among her latest patents, Pazidis developed a method for forming nanostructures on surfaces and an innovative optical element designed for transmission of radiation in the FUV/VUV wavelength range. The method entails providing a surface that is not aligned with a lattice plane of minimal surface energy on a substrate or a coated layer. It further involves introducing energy through electromagnetic radiation to rearrange the surface to create nanostructures. Additionally, her reflective optical element, which boasts an extended service life for VUV wavelengths, features a substrate with a metal layer and specific metal fluoride and oxide layers designed to optimize reflection efficiency.

Career Highlights: Throughout her career, Alexandra Pazidis has made significant strides in her field while working for notable companies, including Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. Her expertise in nanotechnology has led her to create patents that push the boundaries of optical applications.

Collaborations: Collaboration has been key in Pazidis's journey, notably with colleagues such as Christoph Zaczek and Karl-Stefan Weissenrieder, who have supported her pursuits in innovative research and development.

Conclusion: Alexandra Pazidis is a distinguished inventor whose contributions to nanotechnology and optical elements are making waves in the scientific community. With her impressive number of patents and collaborative efforts, she continues to advance the frontiers of innovation in her field.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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