The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Oct. 06, 2023
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Felix Lange, Giengen an der Brenz, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Marcel Haertling, Aalen, DE;
Alexander Wiegand, Aalen, DE;
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/28 (2006.01); C23C 16/30 (2006.01); C23C 16/40 (2006.01); C23C 16/48 (2006.01); C30B 23/00 (2006.01); C30B 30/00 (2006.01); G02B 5/08 (2006.01); G02B 13/14 (2006.01); G03F 7/00 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/48 (2013.01); C23C 14/0021 (2013.01); C23C 14/0694 (2013.01); C23C 14/28 (2013.01); C23C 16/30 (2013.01); C23C 16/40 (2013.01); C23C 16/482 (2013.01); C23C 16/483 (2013.01); C30B 23/00 (2013.01); C30B 30/00 (2013.01); G02B 5/0891 (2013.01); G02B 13/143 (2013.01); G03F 7/70958 (2013.01); C23C 16/45536 (2013.01);
Abstract
The disclosed techniques relate to a method for depositing at least one layer composed of an ionically bonded solid on a substrate, comprising the following steps: converting a coating material to the gas phase and depositing the coating material converted to the gas phase on the substrate. The layer is irradiated with UV/VIS light during the deposition. The disclosed techniques also relate to an apparatus for implementing the disclosed method and optical elements and devices created using the disclosed method.