This inventor holds 1 USPTO granted patent and 3 published patent applications. Top assignee: Carl Zeiss Smt Gmbh. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Marcel Haertling: Innovator in Optical Systems
Introduction
Marcel Haertling is an inventor based in Aalen, Germany. He is known for his innovative approaches to optical systems, particularly in the FUV/VUV wavelength range. Although he currently holds no granted patents, his contributions to the field are noteworthy.
Latest Patent Applications
Marcel Haertling has filed several patent applications that showcase his expertise. One of his latest applications is titled "METHOD FOR OPERATING AN OPTICAL SYSTEM, AND OPTICAL SYSTEM." This method involves operating an optical system that includes at least one reflective optical element with a metallic surface coated with a metal fluoride layer. The method entails irradiating the optical element with radiation in the FUV/VUV wavelength range. The optical system is operated under different ambient conditions during two time intervals, which can alternate between oxidizing and fluorinating conditions.
Another significant application is "METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL ELEMENT AND OPTICAL ARRANGEMENT." This technique focuses on depositing a layer composed of an ionically bonded solid on a substrate. The process includes converting a coating material to the gas phase and depositing it on the substrate while irradiating the layer with UV/VIS light during the deposition.
Conclusion
Marcel Haertling's innovative work in optical systems and his latest patent applications reflect his commitment to advancing technology in this field. His contributions, although not yet recognized through granted patents, demonstrate his potential as an inventor.