The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Mar. 03, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Kerstin Hild, Waldstetten, DE;
Thilo Pollak, Neresheim, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A mirror arrangement () includes: a substrate () with a front side () having a mirror face () reflecting radiation (), and a rear side () facing away from the front side and on which at least one actuator () generating deformations of the mirror face is arranged. A water vapor ()-sorbing material () is formed on the rear side () and forms an adhesive layer () for securing the actuator. The layer extends into interspaces () between the actuators (). A surface () of the water vapor-sorbing material is covered at least partly by a coating () which forms a water vapor diffusion barrier.