The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
May. 14, 2010
Alexandra Pazidis, Essingen-Lautenburg, DE;
Christoph Zaczek, Heubach, DE;
Horst Feldermann, Aalen, DE;
Peter Huber, Aalen, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Christoph Zaczek, Heubach, DE;
Horst Feldermann, Aalen, DE;
Peter Huber, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical element () for reflecting UV radiation at an operating wavelength below 250 nm, preferably at 193 nm, which has a substrate (), a reflective layer () made of aluminum superimposed on the substrate (). The reflective aluminum layer () is not transparent to UV radiation and is (111)-plane oriented. The reflective optical element () has a reflectivity of more than 85%, preferably of more than 88%, and even more preferably of more than 92%, in a range of incident angles of at least 10°, preferably of at least 15°, at the operating wavelength. Also disclosed is an optical element having a reflective layer made from a material having a melting point higher than that of aluminum, as well as methods for producing such optical elements, and optical arrangements incorporating such optical elements.