The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
Jun. 07, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Vitaliy Shklover, Heidenheim, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A method for forming in particular reflection-reducing nanostructures () on a preferably polished surface () of a crystalline, in particular ionic, substrate () for transmission of radiation in the FUV/VUV wavelength range. The method includes: providing a surface (), which surface is not oriented along a lattice plane having a minimum surface energy, on the substrate () or on a layer () applied to the substrate () by a coating method, in particular vacuum vapor deposition, and introducing an energy input (E) into the surface () for rearranging the surface () to form the nanostructures (), wherein the energy input (E) is generated by irradiating the surface () with electromagnetic radiation (). Also, an optical element for transmission of radiation in the FUV/VUV wavelength range.