This inventor holds 16 USPTO granted patents and 5 published patent applications and 5 EPO patents. Top assignees: Carl Zeiss Smt Gmbh, Carl Zeiss Laser Optics Gmbh, Cymer, Inc.. Active years: 2008-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Koenigsbronn, DE (2008 - 2020)
- Konigsbronn, DE (2009 - 2020)
- Heidenheim, DE (2021 - 2024)
Company Filing History:
13 out of 1,479 
2 out of 21 
1 out of 542 
Years Active: 2008-2025
Title: Vitaliy Shklover: Innovator in Optical Technologies
Introduction
Vitaliy Shklover is a prominent inventor based in Konigsbronn, Germany. He has made significant contributions to the field of optical technologies, holding a total of 16 patents. His work focuses on advanced optical elements and methods for nanostructuring surfaces.
Latest Patents
One of his latest patents is for a mirror designed specifically for microlithographic projection exposure apparatuses. This innovative mirror features an optical effective surface, a mirror substrate, and a reflection layer stack that reflects electromagnetic radiation. It also includes an actuator layer system with piezoelectric properties, allowing for precise deformation responses to electrical voltages. Another notable patent involves a method for forming nanostructures on surfaces, particularly for reducing reflection on polished crystalline substrates. This method utilizes electromagnetic radiation to rearrange the surface and create nanostructures that enhance the transmission of radiation in the FUV/VUV wavelength range.
Career Highlights
Throughout his career, Vitaliy Shklover has worked with esteemed companies such as Carl Zeiss SMT GmbH and Carl Zeiss Laser Optics GmbH. His experience in these organizations has allowed him to develop cutting-edge technologies and contribute to advancements in optical engineering.
Collaborations
Vitaliy has collaborated with notable colleagues, including Kerstin Hild and Holger Muenz. Their joint efforts have furthered research and development in the field of optics.
Conclusion
Vitaliy Shklover's innovative work in optical technologies and his numerous patents highlight his significant impact on the industry. His contributions continue to shape advancements in optical engineering and nanostructuring methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile