The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Jan. 03, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); G03F 7/20 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G02B 5/1838 (2013.01); G02B 5/1814 (2013.01); G02B 5/1861 (2013.01); G03F 7/70316 (2013.01); G03F 7/70575 (2013.01); G03F 7/70958 (2013.01); G21K 1/067 (2013.01);
Abstract
An optical grating () includes a substrate (), on the surface () of which a periodic structure () is formed that is embodied to diffract incident radiation (), in particular incident EUV radiation, with a specified wavelength (λ) into a predetermined order of diffraction, in particular into the first order of diffraction (m=+). The optical grating also has a coating () applied onto the periodic structure with at least one layer () that is embodied to suppress the diffraction of the incident radiation into at least one higher order of diffraction (m=+, . . . ) than the predetermined order of diffraction.