Michael Gerhard

This inventor holds 33 USPTO granted patents and 5 EPO patents. Top assignees: Carl Zeiss Smt Gmbh, Carl-Zeiss-Smt Ag, Carl Zeiss Semiconductor Manufacturing Technologies Ag. Active years: 2001-2023.

USPTO Granted Patents = 33

% Patents Active = 45.5

EPO Patents = 5 (Patent Applications = 2)

Average Co-Inventor Count = 2.9

ph-index = 9

Forward Citations = 353(Granted Patents)

Location History:

Aalen-Ebnat, DE (2003)
Aalen, DE (2001 - 2023)

Company Filing History:

Carl Zeiss Semiconductor Manufacturing Technologies Ag

Carl-Zeiss-Stiftung Trading as Carl Zeiss

where one patent can have more than one assignee

Years Active: 2001-2023

Loading Chart...

Areas of Expertise:

Microlithography

Optical Imaging

Illumination Systems

EUV Lithography

Optical Elements

Projection Objectives

Optical Gratings

Polarization Rotators

Crystalline Materials

Decontamination Processes

Optical Beam Deflecting Elements

Optical Integrators

33 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11555783 - Method for detecting particles on the surface of an object, wafer, and mask blank (2023-01-17),

2. 10578783 - Optical grating and optical assembly for same (2020-03-03),

3. 10088754 - Illumination system for microlithography (2018-10-02),

4. 9618387 - Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and EUV lithography apparatus (2017-04-11),

5. 9606441 - Illumination system for microlithography (2017-03-28),

6. 9341953 - Microlithographic illumination system (2016-05-17),

7. 9310693 - Method for operating a projection exposure tool and control apparatus (2016-04-12),

8. 9280060 - Illumination system for microlithography (2016-03-08),

9. 9025131 - Optical beam deflecting element, illumination system including same, and related method (2015-05-05),

10. 8873023 - Illumination system for microlithography (2014-10-28),

11. 8870396 - Substrates for mirrors for EUV lithography and their production (2014-10-28),

12. 8705005 - Microlithographic illumination system (2014-04-22),

13. 8520307 - Optical integrator for an illumination system of a microlithographic projection exposure apparatus (2013-08-27),

14. 8411251 - Optical element and illumination optics for microlithography (2013-04-02),

15. 7961298 - Polarization rotator and a crystalline-quartz plate for use in an optical imaging system (2011-06-14),

Title: The Inventor Michael Gerhard: Revolutionizing Technology in Aalen

Introduction: Michael Gerhard is a renowned inventor based in Aalen, Germany, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Michael Gerhard holds several patents in the areas of renewable energy, sustainable materials, and advanced robotics, showcasing his commitment to creating a more sustainable future.

Career Highlights: With over two decades of experience in the technology sector, Michael Gerhard has worked with leading research institutions and universities to develop cutting-edge solutions that have had a significant impact on various industries.

Collaborations: Throughout his career, Michael Gerhard has collaborated with top companies, innovative startups, and talented individuals to bring his inventions to life and drive positive change in the world of technology.

Conclusion: Michael Gerhard's passion for innovation and his dedication to pushing the boundaries of what is possible make him a true pioneer in the field of technology, inspiring the next generation of inventors to think creatively and strive for excellence.