The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Feb. 01, 2016
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Axel Scholz, Aalen, DE;
Frank Schlesener, Oberkochen, DE;
Nils Haverkamp, Aalen, DE;
Vladimir Davydenko, Bad Herrenalb, DE;
Michael Gerhard, Aalen, DE;
Gerhard-Wilhelm Ziegler, Aalen, DE;
Mirco Kern, Boeblingen a.d.R, DE;
Thomas Bischoff, Koenigsbronn, DE;
Thomas Stammler, Aalen, DE;
Stephan Kellner, Westhausen, DE;
Manfred Maul, Aalen, DE;
Daniel Walldorf, Frankfurt, DE;
Igor Hurevich, Saarbruecken, DE;
Markus Deguenther, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A microlithography illumination system includes a first raster arrangement including a first plurality of bundle-forming raster elements arranged in or adjacent a first plane of the illumination system. The first plurality of bundle-forming raster elements is configured to generate a raster arrangement of secondary light sources. The illumination system also includes a transmission optics configured to superimpose transmission of the illumination light of the secondary light sources into the object field. The transmission optics includes a second raster arrangement comprising a second plurality of bundle-forming raster elements. The illumination system further includes a displacement device configured to displace a displaceable segment of the first raster arrangement relative to the second raster arrangement. The displaceable segment includes exactly one of the raster elements, a group of several raster elements, a raster column, a raster area, or several groups of raster elements.