Company Filing History:
Years Active: 2004-2018
Title: Thomas Stammler: Innovator in Illumination Optical Units
Introduction
Thomas Stammler is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of optical engineering, particularly in the area of illumination systems for projection lithography. With a total of 9 patents to his name, Stammler's work has had a profound impact on the industry.
Latest Patents
Stammler's latest patents include an "Illumination Optical Unit for Projection Lithography" and an "Illumination System for Microlithography." The illumination optical unit guides illumination light toward an object field and features a mirror array with multiple individual mirrors that can be tilted independently. This design allows for precise control of the light path. Additionally, a condenser optical unit transfers the arrangement plane of the mirror array into a pupil plane, enhancing the system's efficiency. The optical hollow waveguide component, located upstream of the mirror array, homogenizes and stabilizes the illumination light beam. This innovation ensures that the illumination system remains insensitive to light source instabilities.
The illumination system for microlithography consists of a raster arrangement that includes at least one raster element of a first type and one of a second type. Each raster element has distinct bundle-influencing effects, allowing for advanced manipulation of light in the lithography process.
Career Highlights
Throughout his career, Thomas Stammler has worked with prestigious companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in optical technology.
Collaborations
Stammler has collaborated with notable colleagues, including Markus Deguenther and Axel Scholz. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Thomas Stammler's contributions to the field of optical engineering, particularly in illumination systems for lithography, highlight his status as a leading inventor. His innovative patents and collaborations with industry professionals continue to shape the future of optical technology.