The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Jul. 19, 2011
Axel Scholz, Aalen, DE;
Frank Schlesener, Oberkochen, DE;
Nils Haverkamp, Aalen, DE;
Vladimir Davydenko, Bad Herrenalb, DE;
Michael Gerhard, Aalen, DE;
Gerhard-wilhelm Ziegler, Aalen, DE;
Mirco Kern, Bobingen a.d.R, DE;
Thomas Bischoff, Koenigsbronn, DE;
Thomas Stammler, Aalen, DE;
Stephan Kellner, Westhausen, DE;
Manfred Maul, Aalen, DE;
Daniel Walldorf, Frankfurt, DE;
Igor Hurevich, Saarbruecken, DE;
Markus Deguenther, Aalen, DE;
Axel Scholz, Aalen, DE;
Frank Schlesener, Oberkochen, DE;
Nils Haverkamp, Aalen, DE;
Vladimir Davydenko, Bad Herrenalb, DE;
Michael Gerhard, Aalen, DE;
Gerhard-Wilhelm Ziegler, Aalen, DE;
Mirco Kern, Bobingen a.d.R, DE;
Thomas Bischoff, Koenigsbronn, DE;
Thomas Stammler, Aalen, DE;
Stephan Kellner, Westhausen, DE;
Manfred Maul, Aalen, DE;
Daniel Walldorf, Frankfurt, DE;
Igor Hurevich, Saarbruecken, DE;
Markus Deguenther, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An illumination system for microlithography serves to illuminate an illumination field with illumination light of a primary light source. A first raster arrangement has bundle-forming first raster elements which are arranged in a first plane of the illumination system or adjacent to the plane. The first raster arrangement serves to generate a raster arrangement of secondary light sources. A transmission optics serves for superimposed transmission of the illumination light of the secondary light sources into the illumination field. The transmission optics has a second raster arrangement with bundle-forming second raster elements. In each case one of the raster elements of the first raster arrangement is allocated to one of the raster elements of the second raster arrangement for guiding a partial bundle of an entire bundle of illumination light. The first raster arrangement for example has at least two types (I, II, III) of the first raster elements which have different bundle-influencing effects. The raster elements of the two raster arrangements are arranged relative to one another in such a way that to each raster element type (I to III) is allocated at least one individual distance (Δ, Δ, Δ) between the first raster element of this type (I to III) and the allocated second raster element of the second raster arrangement. As a result, an illumination system is obtained which allows particular illumination parameters to be influenced in such a way that undesirable influences on other illumination parameters are avoided to the greatest extent possible.