Stephan Kellner

Title: The Innovations of Stephan Kellner

Introduction

Stephan Kellner is a notable inventor based in Westhausen, Germany. He has made significant contributions to the field of microlithography, holding a total of 5 patents. His work focuses on developing advanced illumination systems that enhance the precision and efficiency of microlithographic processes.

Latest Patents

Kellner's latest patents include an innovative illumination system for microlithography. This system features a raster arrangement that consists of at least one raster element of a first type and at least one raster element of a second type. Each raster element of the first type has a unique bundle-influencing effect, while the second type has a different effect. The arrangement is designed to optimize the illumination process by strategically placing these elements in distinct areas. Another patent describes a microlithography illumination system that includes a first raster arrangement with a plurality of bundle-forming raster elements. These elements are configured to generate a raster arrangement of secondary light sources, which are then superimposed into the object field through advanced transmission optics.

Career Highlights

Stephan Kellner is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and solutions. His work at Zeiss has allowed him to push the boundaries of microlithography technology, contributing to advancements that are crucial for the semiconductor industry.

Collaborations

Kellner collaborates with talented professionals in his field, including Markus Deguenther and Axel Scholz. These collaborations foster an environment of innovation and creativity, leading to groundbreaking developments in microlithography.

Conclusion

Stephan Kellner's contributions to microlithography through his patents and work at Carl Zeiss SMT GmbH highlight his role as a key innovator in the field. His advancements continue to shape the future of optical technology.