Company Filing History:
Years Active: 2013-2019
Title: Gerhard-Wilhelm Ziegler: Innovator in Microlithography
Introduction
Gerhard-Wilhelm Ziegler is a prominent inventor based in Aalen, Germany. He has made significant contributions to the field of microlithography, holding a total of 13 patents. His work focuses on advanced illumination systems that enhance the precision of microlithographic exposure apparatuses.
Latest Patents
One of his latest patents is an illumination system designed for illuminating a mask in a microlithographic exposure apparatus. This innovative system is configured to illuminate a mask positioned in a mask plane. It includes a pupil shaping optical subsystem and illuminator optics that illuminate a beam deflecting component. The system determines the property of the beam deflecting component by analyzing the intensity distribution in the system pupil surface. This ensures that the intensity distribution produced by the pupil shaping subsystem closely approximates the desired intensity distribution. The system takes into account various aberrations, including those produced by the illuminator optics and the pupil shaping optical subsystem.
Another notable patent involves a raster arrangement that includes at least one raster element of a first type and at least one raster element of a second type. Each raster element of the first type has a unique bundle-influencing effect, while the second type has a different effect. This arrangement is crucial for optimizing the performance of microlithographic systems.
Career Highlights
Gerhard-Wilhelm Ziegler is currently associated with Carl Zeiss SMT GmbH, a leading company in the field of optical systems and microlithography. His work at this esteemed organization has allowed him to push the boundaries of innovation in the industry.
Collaborations
Throughout his career, Ziegler has collaborated with notable colleagues, including Markus Deguenther and Erich Schubert. These partnerships have contributed to the advancement of technology in microlithography.
Conclusion
Gerhard-Wilhelm Ziegler's contributions to microlithography through his innovative patents and collaborations highlight his significant role in advancing this critical field. His work continues to influence the development of precision optical systems.
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