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Oberkochen, Germany

Carl Zeiss Semiconductor Manufacturing Technologies Ag

USPTO Granted Patents = 22

Forward Citations = 268

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47 inventors (with patents filed for the assignee):

Karl-Heinz Schuster (6 out of 98 patents)

Wolfgang Singer (4 out of 120 patents)

Alexander Epple (4 out of 84 patents)

4. Wilhelm Ulrich (4 out of 133 patents)

5. Johannes Wangler (3 out of 83 patents)

6. Helmut Beierl (3 out of 24 patents)

7. Bernhard Gellrich (2 out of 53 patents)

8. Hubert Holderer (2 out of 61 patents)

9. Martin Antoni (2 out of 31 patents)

10. David R Shafer (2 out of 86 patents)

11. Toralf Gruner (1 out of 128 patents)

12. Jens Kugler (1 out of 62 patents)

13. Udo Dinger (1 out of 45 patents)

14. Ulrich Weber (1 out of 40 patents)

15. Michael Gerhard (1 out of 33 patents)

22 patents: Sort by Forward Citations

1. 7289279 - Lithographic objective having a first lens group including only lenses having a positive refractive power (2007-10-30),

2. 7154678 - Projection objective having adjacently mounted aspheric lens surfaces (2006-12-26),

3. 7023627 - Lithographic objective having a first lens group including only lenses having a positive refractive power (2006-04-04),

4. 7006595 - Illumination system particularly for microlithography (2006-02-28),

5. 6937394 - Device and method for changing the stress-induced birefringence and/or the thickness of an optical component (2005-08-30),

6. 6864988 - Optical system with isolated measuring structure (2005-03-08),

7. 6862137 - Method for adjusting a lamp relative to an illuminating beam path of a microscope and a microscope suitable for carrying out the method (2005-03-01),

8. 6809871 - Geometric beamsplitter and method for its fabrication (2004-10-26),

9. 6788471 - Projection exposure apparatus for microlithography (2004-09-07),

10. 6788387 - Lithographic objective having a first lens group including only lenses having a positive refractive power (2004-09-07),

11. 6784977 - Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography (2004-08-31),

12. 6774984 - Optical imaging system with polarizer and a crystalline-quartz plate for use therewith (2004-08-10),

13. 6744574 - Mount for an optical element in an optical imaging device (2004-06-01),

14. 6733369 - Method and apparatus for polishing or lapping an aspherical surface of a work piece (2004-05-11),

15. 6733165 - Optical integrator for an illumination device (2004-05-11),

Carl Zeiss Semiconductor Manufacturing Technologies AG is a leading provider of cutting-edge solutions for the semiconductor industry. With a commitment to innovation, precision, and quality, the company offers a wide range of products and services that enable the manufacturing of advanced semiconductor devices. By utilizing state-of-the-art technologies and expertise, Carl Zeiss Semiconductor Manufacturing Technologies AG is dedicated to helping its customers achieve higher yields, increased productivity, and enhanced process control in semiconductor manufacturing.

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Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

22 Patents

#11 in Oberkochen

#2,085 in Germany

#27,863 in the World

Oberkochen, Germany

Carl Zeiss Semiconductor Manufacturing Technologies Ag

Forward Citations = 268

47 inventors:

Karl-Heinz Schuster (6 out of 98 patents)

Wolfgang Singer (4 out of 120 patents)

Alexander Epple (4 out of 84 patents)

4. Wilhelm Ulrich (4 out of 133 patents)

5. Johannes Wangler (3 out of 83 patents)

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