Inventors with similar research interests:
Location History:
- Konigsbronn, DE (1999 - 2008)
- Koenigsbronn, DE (2001 - 2008)
- Königsbronn, DE (2001 - 2010)
- Oberkochen, DE (2005 - 2023)
Company Filing History:
26 out of 461 
14 out of 702 
14 out of 1,405 
Years Active: 1999-2023
Title: Innovations of Hubert Holderer in Projection Exposure Technology
Introduction
Hubert Holderer, an esteemed inventor based in Oberkochen, Germany, boasts an impressive portfolio of 61 patents. His work predominantly revolves around advancements in projection exposure apparatus technologies, particularly in the fields of illumination optical units and reflection surfaces.
Latest Patents
Among his most notable recent patents is a facet mirror designed for an illumination optical unit within projection exposure apparatuses. This innovative facet mirror consists of a multitude of displaceable individual facets, each equipped with a main body and a reflection surface. Its ingenious design allows for certain facets to engage with a stop surface during various displacement positions.
Another significant contribution from Holderer is a measurement illumination optical unit specifically created for guiding illumination light into the object field of a projection exposure system intended for EUV lithography. This unit includes a field facet mirror with numerous field facets, alongside a pupil facet mirror also comprising multiple pupil facets. These elements facilitate overlaid imaging in the object field, utilizing a field facet imaging channel for the illumination light, and are characterized by a field stop that delineates the illumination field's boundaries.
Career Highlights
Throughout his career, Hubert Holderer has made substantial contributions to the scientific community while working with prominent companies such as Carl Zeiss SMT AG and Carl Zeiss Stiftung. His innovative spirit and dedication have significantly impacted the development of optical technologies.
Collaborations
Holderer has had the opportunity to collaborate with notable professionals in his field, including Alexander Kohl and Ulrich Weber. These partnerships have greatly enriched his innovative pursuits and facilitated the advancement of his projects.
Conclusion
In conclusion, Hubert Holderer stands out as a prolific inventor with a remarkable number of patents that enhance projection exposure technologies. His forward-thinking designs and collaborative efforts continue to drive the evolution of optical innovations, solidifying his legacy in the realm of technical advancements.
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