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Company Filing History:
Years Active: 2002-2022
Sure, I can help you with that. Here is an article about inventor Bernhard Gellrich:
Title: Innovator Spotlight: Bernhard Gellrich - Revolutionizing Semiconductor Lithography in Aalen, DE
Introduction:
Bernhard Gellrich is a prolific inventor based in Aalen, Germany, known for his groundbreaking work in semiconductor lithography. With an impressive portfolio of 53 patents, Gellrich's contributions have significantly advanced the field of projection exposure apparatus for semiconductor lithography.
Latest Patents:
1. Projection Exposure Apparatus for Semiconductor Lithography: Gellrich's patent introduces a novel projection optical unit with advanced features such as sensor frames, carrying frames, and modules equipped with optical elements and actuators for precise positioning. The infrastructure includes interfaces for easy module exchange while maintaining reference integrity within the apparatus.
2. Optical Arrangement, in particular Lithography System: Another patent by Gellrich showcases an optical arrangement, notably a lithography system, comprising a movable component like a mirror, actuators for movement, and innovative stop faces for controlling component movement in various directions.
Career Highlights:
Gellrich has made significant contributions to the field during his tenure at leading companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His expertise and innovation have played a pivotal role in shaping the landscape of semiconductor lithography technology.
Collaborations:
Throughout his career, Gellrich has collaborated with industry experts like Jens Kugler and Bernhard Geuppert. Together, they have worked on cutting-edge projects, pushing boundaries in semiconductor lithography and optical system design.
Conclusion:
Bernhard Gellrich's pioneering work in semiconductor lithography has cemented his legacy as a visionary inventor in the field. With a strong foundation of patents and a history of collaboration with top professionals, Gellrich continues to drive innovation and excellence in the industry.
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