Bernhard Gellrich

This inventor holds 53 USPTO granted patents and 8 published patent applications and 10 EPO patents, primarily in Optical Lithography (CPC class G03F). Top assignees: Carl Zeiss Smt Gmbh, Carl-Zeiss-Smt Ag, Asml Netherlands B.v.. Active years: 2002-2022.

USPTO Granted Patents = 53 (Patent Applications = 8)

% Patents Active = 47.2

EPO Patents = 10 (Patent Applications = 4)

Average Co-Inventor Count = 5.4

ph-index = 9

Forward Citations = 242(Granted Patents)

Forward Citations (Not Self Cited) = 219(Dec 10, 2025)

Inventors with similar research interests:

Company Filing History:

Asml Netherlands B.v.

Carl Zeiss Semiconductor Manufacturing Technologies Ag

patents

where one patent can have more than one assignee

Years Active: 2002-2022

Loading Chart...

Areas of Expertise:

Projection Exposure Apparatus

Optical Arrangement

Microlithography

Imaging Optical System

Thermal Attenuation

Dynamic Fluctuations

EUV Lithography

Immersion Lithography

Optical Element Unit

Correction Arrangement

Holding Device

Replacement Device

53 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11281114 - Projection exposure apparatus for semiconductor lithography (2022-03-22),

2. 10809636 - Optical arrangement, in particular lithography system (2020-10-20),

3. 10754132 - Imaging optical system for microlithography (2020-08-25),

4. 10571813 - Connection arrangement for a force-fit connection between ceramic components (2020-02-25),

5. 10203607 - Optical element unit for exposure processes (2019-02-12),

6. 9996015 - Mirror module, in particular for a microlithographic projection exposure appararatus (2018-06-12),

7. 9891535 - Optical projection system (2018-02-13),

8. 9817322 - Optical imaging device and method for reducing dynamic fluctuations in pressure difference (2017-11-14),

9. 9810996 - Optical imaging device with thermal attenuation (2017-11-07),

10. 9557653 - Optical projection system (2017-01-31),

11. 9298111 - Optical arrangement in a projection exposure apparatus for EUV lithography (2016-03-29),

12. 9182679 - Lithographic apparatus and device manufacturing method (2015-11-10),

13. 9104016 - Optical projection system (2015-08-11),

14. 9046795 - Optical element unit for exposure processes having sealing element (2015-06-02),

15. 8902401 - Optical imaging device with thermal attenuation (2014-12-02),

Sure, I can help you with that. Here is an article about inventor Bernhard Gellrich:

Title: Innovator Spotlight: Bernhard Gellrich - Revolutionizing Semiconductor Lithography in Aalen, DE

Introduction:

Bernhard Gellrich is a prolific inventor based in Aalen, Germany, known for his groundbreaking work in semiconductor lithography. With an impressive portfolio of 53 patents, Gellrich's contributions have significantly advanced the field of projection exposure apparatus for semiconductor lithography.

Latest Patents:

1. Projection Exposure Apparatus for Semiconductor Lithography: Gellrich's patent introduces a novel projection optical unit with advanced features such as sensor frames, carrying frames, and modules equipped with optical elements and actuators for precise positioning. The infrastructure includes interfaces for easy module exchange while maintaining reference integrity within the apparatus.

2. Optical Arrangement, in particular Lithography System: Another patent by Gellrich showcases an optical arrangement, notably a lithography system, comprising a movable component like a mirror, actuators for movement, and innovative stop faces for controlling component movement in various directions.

Career Highlights:

Gellrich has made significant contributions to the field during his tenure at leading companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His expertise and innovation have played a pivotal role in shaping the landscape of semiconductor lithography technology.

Collaborations:

Throughout his career, Gellrich has collaborated with industry experts like Jens Kugler and Bernhard Geuppert. Together, they have worked on cutting-edge projects, pushing boundaries in semiconductor lithography and optical system design.

Conclusion:

Bernhard Gellrich's pioneering work in semiconductor lithography has cemented his legacy as a visionary inventor in the field. With a strong foundation of patents and a history of collaboration with top professionals, Gellrich continues to drive innovation and excellence in the industry.