The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2017
Filed:
Sep. 09, 2011
Stefan Hembacher, Bobingen, DE;
Bernhard Gellrich, Aalen, DE;
Jens Kugler, Aalen, DE;
Sascha Bleidistel, Aalen, DE;
Stefan Hembacher, Bobingen, DE;
Bernhard Gellrich, Aalen, DE;
Jens Kugler, Aalen, DE;
Sascha Bleidistel, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (), wherein the holding device holds the optical element and a first part () of the optical element contacts a first atmosphere and a second part () of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.