The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Jul. 16, 2019
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Bernhard Gellrich, Aalen, DE;
Ralf Zweering, Aalen, DE;
Charles Seviour, Aalen-Wasseralfingen, DE;
Michael Erath, Dietenheim, DE;
Jens Prochnau, Oberkochen, DE;
Marwène Nefzi, Ulm, DE;
Viktor Kulitzki, Zwickau, DE;
Axel Lorenz, Meissen, DE;
Stefan Schaff, Ellwangen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.