Dietenheim, Germany

Michael Erath

USPTO Granted Patents = 7 

Average Co-Inventor Count = 2.4

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2016-2025

Loading Chart...
7 patents (USPTO):Explore Patents

Title: Michael Erath: Innovator in Semiconductor Technology

Introduction

Michael Erath is a prominent inventor based in Dietenheim, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on enhancing the efficiency and functionality of projection exposure apparatuses used in semiconductor lithography.

Latest Patents

Among his latest innovations is a projection exposure apparatus for semiconductor lithography that incorporates a vibration damper. This apparatus features a holder and a mass connected via a damping element, along with a temperature control device for managing the damping element's temperature. Another notable patent is a weight-force compensation device, which includes a stator and a translator that moves along a designated axis. This device utilizes multiple permanent magnet arrangements to create a compensating force that counteracts the weight acting on the translator.

Career Highlights

Michael Erath is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and semiconductor manufacturing. His innovative designs and patents have contributed to advancements in the industry, showcasing his expertise and commitment to technological progress.

Collaborations

Throughout his career, Michael has collaborated with notable colleagues, including Jasper Wesselingh and Ralf Zweering. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Michael Erath's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in the industry, making a lasting impact on semiconductor manufacturing processes.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…