The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
May. 28, 2013
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Michael Erath, Dietenheim, DE;
Florian Bach, Oberkochen, DE;
Ulrich Schoenhoff, Neu-Ulm, DE;
Rodolfo Rabe, Aalen-Himmlingen, DE;
Norbert Muehlberger, Aalen-Ebnat, DE;
Dirk Eicher, Schorndorf, DE;
Jasper Wesselingh, Moettingen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising a weight force compensation device for exerting a compensation force on the optical element, wherein the compensation force at least partly compensates for the weight force acting on the optical element, wherein the weight force compensation device has a passive magnetic circuit for generating a force component of the compensation force acting on the optical element, and wherein at least one adjustment element is provided via which the force component generated by the passive magnetic circuit is continuously adjustable.