Company Filing History:
Years Active: 2012-2018
Title: Innovations of Florian Bach
Introduction
Florian Bach is a prominent inventor based in Oberkochen, Germany. He has made significant contributions to the field of microlithography, holding a total of 17 patents. His work focuses on enhancing optical components used in advanced projection exposure apparatuses.
Latest Patents
One of his latest patents is for a facet mirror designed for use in a projection exposure apparatus for microlithography. This facet mirror consists of multiple separate mirrors, each connected to an actuator that allows for individual tilting. This innovative design increases the variability for setting various illumination geometries of the object field illuminated by the apparatus. Another notable patent involves a method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus. This system includes individually drivable elements that variably illuminate a pupil surface, enhancing the precision of light beam deviations.
Career Highlights
Florian Bach is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and solutions. His work at this esteemed organization has allowed him to push the boundaries of microlithographic technology.
Collaborations
He collaborates with talented coworkers such as Armin Werber and Yim-Bun Patrick Kwan, contributing to the advancement of innovative optical technologies.
Conclusion
Florian Bach's contributions to microlithography through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the development of advanced optical systems.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.