The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Feb. 18, 2010
Severin Waldis, Aalen, DE;
Florian Bach, Oberkochen, DE;
Daniel Benz, Winnenden, DE;
Armin Werber, Gottenheim, DE;
Wilfried Noell, Neuchatel, CH;
Dirk Heinrich Ehm, Lauchheim, DE;
Stefan Wiesner, Lauchheim, DE;
Dieter Kraus, Oberkochen, DE;
Severin Waldis, Aalen, DE;
Florian Bach, Oberkochen, DE;
Daniel Benz, Winnenden, DE;
Armin Werber, Gottenheim, DE;
Wilfried Noell, Neuchatel, CH;
Dirk Heinrich Ehm, Lauchheim, DE;
Stefan Wiesner, Lauchheim, DE;
Dieter Kraus, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.