Daniel Benz

Title: The Innovative Mind of Daniel Benz

Introduction

Daniel Benz is a prominent inventor based in Winnenden, Germany. With a total of five patents to his name, he has made significant contributions to the field of microlithography, particularly in projection exposure apparatus technology. His innovative designs reflect a deep understanding of both engineering and optical systems.

Latest Patents

Among his latest achievements is a patent for a microlithographic projection exposure apparatus. This device features a mirror array that includes a base body and multiple mirror units, each equipped with a mirror and a solid-state articulation. This innovative articulation allows for the adjustment of the mirror's alignment in relation to the base body, enhancing precision in photographic processes. Additionally, the mirror and base body are designed with matching glide surfaces, which help in maintaining stability during operation.

Another notable patent is for an illumination system of a microlithographic projection exposure apparatus, incorporating a temperature control device. This system features a primary light source, a system pupil surface, and an adaptive mirror array that directs light toward the system pupil surface. The patent outlines a configuration where each mirror element can be tiltably mounted, with distinct materials that allow for temperature modifications, enabling fine-tuning of the shapes of the mirror elements for optimal light projection.

Career Highlights

Daniel Benz works at Carl Zeiss SMT GmbH, a company renowned for its innovations in optical systems and equipment. His tenure with Carl Zeiss has allowed him to translate theoretical designs into practical applications that significantly impact various industries, including semiconductor manufacturing and precision optics.

Collaborations

Throughout his career, Daniel has collaborated with talented professionals like Florian Bach and Severin Waldis. Together, they have pushed the boundaries of technology and innovation, fostering a creative environment that encourages experimentation and advancement in their field.

Conclusion

Daniel Benz exemplifies the spirit of innovation in modern technology. His patents not only showcase his technical expertise but also contribute substantially to advancements in microlithography. As he continues his work at Carl Zeiss SMT GmbH, the industry anticipates further breakthroughs that could arise from his inventive mind.