Company Filing History:
Years Active: 2014-2018
Title: Norbert Muehlberger: Innovator in Microlithography Technology
Introduction
Norbert Muehlberger is a prominent inventor based in Aalen-Ebnat, Germany. He has made significant contributions to the field of microlithography, particularly in the development of optical components for projection exposure apparatuses. With a total of nine patents to his name, Muehlberger's work has advanced the technology used in semiconductor manufacturing.
Latest Patents
Muehlberger's latest patents include innovative designs for facet mirrors used in projection exposure apparatuses for microlithography. One of his notable inventions is a facet mirror that serves as a bundle-guiding optical component. This facet mirror consists of multiple separate mirrors, each connected to an actuator, allowing for individual deflection of incident illumination light. The control device associated with these actuators enables the grouping of mirrors into separate mirror groups, enhancing the variability for setting different illumination geometries. Another significant patent involves a projection exposure apparatus that features an optical assembly with mechanically controlled optical elements. This design minimizes parasitic mechanical effects during specific operating states, ensuring precise operation in semiconductor component production.
Career Highlights
Muehlberger is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and technology. His work at Zeiss has positioned him at the forefront of innovations in microlithography, contributing to advancements that are crucial for the semiconductor industry.
Collaborations
Throughout his career, Muehlberger has collaborated with notable colleagues, including Armin Werber and Juergen Fischer. These collaborations have fostered a creative environment that has led to the development of cutting-edge technologies in the field.
Conclusion
Norbert Muehlberger's contributions to microlithography technology through his patents and work at Carl Zeiss SMT GmbH highlight his role as a key innovator in the semiconductor industry. His inventions continue to influence the efficiency and effectiveness of optical systems used in modern manufacturing processes.
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