The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Aug. 02, 2011
Applicants:
Armin Werber, Gottenheim, DE;
Norbert Muehlberger, Aalen-Ebnat, DE;
Almut Czap, Aalen, DE;
Juergen Fischer, Heidenheim, DE;
Inventors:
Armin Werber, Gottenheim, DE;
Norbert Muehlberger, Aalen-Ebnat, DE;
Almut Czap, Aalen, DE;
Juergen Fischer, Heidenheim, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 26/08 (2006.01); G02B 27/00 (2006.01); H01F 7/02 (2006.01); H01F 7/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70291 (2013.01); G02B 26/085 (2013.01); G02B 27/0006 (2013.01); G03F 7/7095 (2013.01); H01F 7/0221 (2013.01); H01F 7/1623 (2013.01); H01F 7/1638 (2013.01);
Abstract
The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection.