The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
May. 19, 2011
Norbert Muehlberger, Aalen-Ebnat, DE;
Thorsten Rassel, Huettlingen, DE;
Armin Schoeppach, Aalen, DE;
Juergen Fischer, Heidenheim, DE;
Matthias Orth, Neresheim-Elchingen, DE;
Norbert Muehlberger, Aalen-Ebnat, DE;
Thorsten Rassel, Huettlingen, DE;
Armin Schoeppach, Aalen, DE;
Juergen Fischer, Heidenheim, DE;
Matthias Orth, Neresheim-Elchingen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.