Neresheim-Elchingen, Germany

Matthias Orth

USPTO Granted Patents = 5 

 

Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2014-2018

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5 patents (USPTO):Explore Patents

Title: Matthias Orth: Innovator in Optical Components and Microlithography

Introduction

Matthias Orth is a distinguished inventor based in Neresheim-Elchingen, Germany. He has made significant contributions to the field of optical components and microlithography, holding a total of 5 patents. His work is characterized by innovative designs that enhance the functionality and precision of optical systems.

Latest Patents

One of Matthias Orth's latest patents is an optical component that features a mirror array with multiple mirror elements. Each element is connected to at least one actuator for displacement, along with a series of signal lines that facilitate communication with an external control device. This design allows for precise positioning of the mirror elements, enhancing the overall performance of optical systems.

Another notable patent is for a projection exposure apparatus used in microlithography for semiconductor production. This apparatus includes an optical assembly with an actuated optical element, designed to minimize parasitic mechanical effects during operation. The integration of control signal transmission and energy transmission devices ensures that the optical assembly functions optimally, which is crucial for the production of high-quality semiconductor components.

Career Highlights

Matthias Orth is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technologies. His role involves developing advanced optical components that push the boundaries of current technology. His expertise and innovative mindset have made him a valuable asset to the company.

Collaborations

Throughout his career, Matthias has collaborated with notable colleagues, including Juergen Fischer and Armin Schoeppach. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Matthias Orth's contributions to optical components and microlithography exemplify his commitment to innovation and excellence in engineering. His patents reflect a deep understanding of the complexities involved in optical systems, positioning him as a key figure in his field.

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