The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Jul. 17, 2014
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Severin Waldis, Bern, CH;
Matthias Orth, Neresheim-Elchingen, DE;
Roger Marc Bostock, Muensingen, CH;
Jian Deng, Biel, CH;
Sebastian Lani, Courtman, CH;
Benedikt Knauf, Aalen, DE;
Christian Kempter, Wittislingen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component.