Carl Zeiss Smt Gmbh

Matthias Orth

Armin Schoeppach

Juergen Fischer

Thorsten Rassel

Norbert Muehlberger

Armin Werber

Juergen Huber

Severin Waldis

Christian Kempter

Benedikt Knauf

Roger Marc Bostock

Jian Deng

Sebastian Lani

Matthias Hartmann

An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component.

Optical component

A projection exposure apparatus for microlithography for the production of semiconductor components includes at least one optical assembly with at least one optical element which can be actuated in a mechanically controlled manner is mounted in a structure. For carrying out the mechanical actuation, a control signal transmission device and/or an energy transmission device are/is provided, which introduce(s) no parasitic mechanical effects into the optical assembly at least during specific operating states of the projection exposure apparatus.

Projection exposure apparatus for microlithography for the production of semiconductor components

A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.

Gravitation compensation for optical elements in projection exposure apparatuses

Growing community of inventors

Neresheim-Elchingen, Germany

Matthias Orth