The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Jul. 15, 2019
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Ralf Zweering, Aalen, DE;
Steffen Fritzsche, Aalen, DE;
Hendrik Wagner, Aalen, DE;
Florian Ahles, Aalen, DE;
Jens Prochnau, Oberkochen, DE;
Michael Erath, Dietenheim, DE;
Viktor Kulitzki, Zwickau, DE;
Marwène Nefzi, Ulm, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical arrangement, for example a lithography system, includes: a first component, in particular a carrying frame; a second component, in particular a mirror, which is movable in relation to the first component; and at least one stop with at least one stop face for limiting the movement of the second component in relation to the first component. The optical arrangement, preferably the stop, can have a fixing device for fixing the second component. The fixing device can have a fixing element that is movable in relation to the stop face of the stop. Further aspects of the device likewise relate to an optical arrangement with a fixing device or with a transport lock.