The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2017

Filed:

Jul. 07, 2015
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Johannes Rau, Gerstetten, DE;

Armin Schoeppach, Aalen, DE;

Bernhard Gellrich, Aalen, DE;

Jens Kugler, Aalen, DE;

Martin Mahlmann, Heidenheim, DE;

Bernhard Geuppert, Aalen, DE;

Thomas Petasch, Aalen, DE;

Gerhard Fuerter, Ellwangen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01); G03F 7/20 (2006.01); G02B 7/02 (2006.01); G02B 7/22 (2006.01); G02B 7/00 (2006.01); G02B 17/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G02B 7/00 (2013.01); G02B 7/008 (2013.01); G02B 7/021 (2013.01); G02B 7/028 (2013.01); G02B 7/22 (2013.01); G02B 17/08 (2013.01); G02B 17/0804 (2013.01); G02B 17/0812 (2013.01); G02B 17/0892 (2013.01); G03F 7/70808 (2013.01); G03F 7/70825 (2013.01); G03F 7/70833 (2013.01); G03F 7/70883 (2013.01);
Abstract

An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.


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