The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Sep. 20, 2002
Applicant:
Inventors:
Ulrich Weber, Ulm, DE;
Jochen Becker, Rengsdorf, DE;
Hubert Holderer, Koenigsbronn, DE;
Bernhard Gellrich, Aalen, DE;
Jens Kugler, Heubach, DE;
Assignee:
Carl Zeiss Semiconductor Manufacturing Technologies AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 ;
U.S. Cl.
CPC ...
G02B 7/02 ;
Abstract
A mount for an optical element in an optical imaging device, in particular in a lens system ( ) for semiconductor lithography, has at least one mounting ring ( ) which bears the optical element ( ). The mounting ring ( ) is of at least partially hollow design in cross section.