The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Mar. 01, 2002
Peter Ott, Lauffen am Neckar, DE;
Peter Ott, Lauffen am Neckar, DE;
Carl Zeiss Semiconductor Manufacturing Technologies AG, Oberkochen, DE;
Abstract
The invention relates to a method for automatic lamp adjustment in a microscope without beam homogenizers in the illuminating beam path and a microscope equipped for the application of the method. According to the invention, the light power in the illuminating beam path is integrally measured with a detector behind the pupil plane of the microscope objective or behind the pupil plane of the illuminating beam path and the lamp is so adjusted relative to the illuminating beam path that the light power, which is detected by the detector, is a maximum. In a microscope, which is suitable for an automated lamp adjustment, for example, after an exchange of the lamp according to the method of the invention, motorized drives are provided for adjusting the lamp. These drives are driven sequentially by an evaluation and control computer until a maximum light power is detected with a detector.