The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Mar. 15, 2005
Karl-heinz Schuster, Königsbronn, DE;
David R. Shafer, Fairfield, CT (US);
Wilhelm Ulrich, Aalen, DE;
Helmut Beierl, Heidenheim, DE;
Wolfgang Singer, Aalen, DE;
Karl-Heinz Schuster, Königsbronn, DE;
David R. Shafer, Fairfield, CT (US);
Wilhelm Ulrich, Aalen, DE;
Helmut Beierl, Heidenheim, DE;
Wolfgang Singer, Aalen, DE;
Carl Zeiss Semiconductor Manufacturing Technologies AG, Oberkochen, DE;
Abstract
A projection objective has at least five lens groups (Gto G) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere () is mounted at a minimum distance from an image plane (') which is greater than the maximum lens diameter (D) of the objective.