Udo Dinger

This inventor holds 46 USPTO granted patents and 6 published patent applications and 7 EPO patents, primarily in EUV Lithography. Top assignees: Carl-Zeiss-Smt Ag, Carl Zeiss Smt Gmbh, Carl-Zeiss-Stiftung. Active years: 1999-2026.

USPTO Granted Patents = 46 (Patent Applications = 6)

% Patents Active = 52.2

EPO Patents = 7 (Patent Applications = 7)

Average Co-Inventor Count = 2.6

ph-index = 14

Forward Citations = 555(Granted Patents)

Company Filing History:

Carl Zeiss Semiconductor

patent

5. 1 out of 22

Carl Zeiss Semiconductor Manufacturing Technologies Ag

patents

6. 1 out of 11

Carl-Zeiss-Stiftung Trading as Carl Zeiss

where one patent can have more than one assignee

Years Active: 1999-2026

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Areas of Expertise:

EUV Lithography

Illumination Systems

Projection Objectives

Optical Elements

Facet Mirrors

EUV Mirrors

High-Power Lasers

Microlithography

Beam Guidance

Substrate Materials

X-Ray Optical Components

Optical Systems

46 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12645149 - Multi-mirror array (2026-06-02),

2. 11303092 - Radiation source and device for feeding back emitted radiation to a laser source (2022-04-12),

3. 11199780 - Reflective optical element for EUV lithography and method for adapting a geometry of a component (2021-12-14),

4. 10261424 - Lithography apparatus and method for operating a lithography apparatus (2019-04-16),

5. 9997268 - EUV-mirror, optical system with EUV-mirror and associated operating method (2018-06-12),

6. 9996012 - Facet mirror for use in a projection exposure apparatus for microlithography (2018-06-12),

7. 9448490 - EUV lithography system (2016-09-20),

8. 9444214 - Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system (2016-09-13),

9. 9442383 - EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method (2016-09-13),

10. 9411241 - Facet mirror for use in a projection exposure apparatus for microlithography (2016-08-09),

11. 9007559 - EUV collector with cooling device (2015-04-14),

12. 8976927 - Substrate for mirrors for EUV lithography (2015-03-10),

13. 8934085 - Bundle-guiding optical collector for collecting the emission of a radiation source (2015-01-13),

14. 8710471 - Projection illumination system for EUV microlithography (2014-04-29),

15. 8587767 - Illumination optics for EUV microlithography and related system and apparatus (2013-11-19),

Title: Inventor Udo Dinger: Revolutionizing Technology in Oberkochen

Introduction: Udo Dinger, a visionary inventor hailing from Oberkochen, Germany, has been at the forefront of technological advancements in the region for decades.

Latest Patents: Udo Dinger's latest patents focus on cutting-edge optical technologies that have the potential to reshape industries worldwide.

Career Highlights: With a career spanning over 30 years, Udo Dinger has a proven track record of developing innovative solutions that have garnered international acclaim.

Collaborations: Throughout his career, Udo Dinger has collaborated with leading research institutions and tech companies to push the boundaries of what is possible in the field of optics.

Conclusion: Udo Dinger's relentless pursuit of innovation and his passion for pushing the limits of technology make him a true pioneer in the world of inventors.